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May 22, 2014 - Peter de Groot

May 22, 2014 - Peter de Groot

The Meaning And Measure Of Lateral Resolution In Optical Surface Topography Measurements

Note: This meeting will be at Optikos Corporation

Traditional specifications for resolving power for imaging systems rely either single numbers, such as the familiar Rayleigh or Sparrow criteria, or detailed response information as a function of spatial frequency, as in the modulation transfer function or MTF. Currently there is quite an active debate within the international standards community regarding the meaning, specification and verification of lateral resolution in a 3D height map. This debate is taking place simultaneously in commerce, where one observes a divergence by as much as a factor of ten in quoted lateral resolution for topography instruments that have comparable resolving power.  Here I make some modest proposals aimed at clarifying terminology and validation, based in part on the detailed physical behavior of optical areal surface topography instruments, including in particular phase-shifting and coherence-scanning interferometers.


Peter de Groot, Zygo Corporation

Peter de Groot, Ph.D. invents and develops optical instruments for Zygo Corporation, where he is Executive Director of R&D.  A physics graduate from the University of Connecticut, Dr. de Groot has published 128 technical papers and is an inventor for 122 US patents in optics.  His current interests include surface structure analysis, industrial quality control, stage motion measurement, interference microscopy, laser interferometry, optical testing, signal processing, international metrology standards, and management of intellectual property.  He is an SPIE Fellow and active member of the optics community.


Pre-registration discount DINNER reservations must be made by 6 PM, May 19, 2014,the Monday before the meeting. Full-price reservation accepted thereafter. Walk-ins welcome at full-price. MEETING-ONLY registrations appreciated by May 21, 2014

Please make reservations online. Reservations may also be left on the answering machine at 617.584.0266. We no longer have an email address for reservations due to SPAM. When making reservation requests, please provide the following information:

  • DINNER AND MEETING or meeting only
  • Name(s) and membership status
  • Daytime phone number where you can be reached (in case of change or cancellation)


Optikos Corporation
107 Audubon Road, Bldg. 3
Wakefield, MA 01880


(Map to Optikos)

Networking—5:45 PM, Dinner—6:45, Meeting—7:30 PM.


Vegetarian option available on request

Dinner Prices:

   Register on/before
 DINNER Reservation Date 
 Late Reservations 
 NES/OSA Members and their guests   $25.00 each   $30.00 
 Non-members   $30.00 (See NOTE Below)   $35.00 
 Students   $5.00   $5.00 
 Post-Docs   $15.00   $15.00 








NOTE: The NES/OSA has not changed dinner prices in several years but has been facing higher costs. We will maintain the current dinner prices for those reserving dinner on the requested date but still try to accommodate late reservations.

General Information on NES/OSA Meetings

Cancellations and No-shows:

If the meeting must be canceled for any reason, we will try to call you at the phone number you leave with your reservation. Official notice of cancellation will be on our answering machine.

We have to pay for the dinners reserved as of the Tuesday before the meeting, so no-shows eat into our cash reserve. If you will not be able to attend, please let us know as early as possible. Otherwise, no-shows will be billed.

Membership Rates:

Regular members $15.00
Student members free




NOTE: The extra $5.00 of the non-member dinner fee can be used toward membership dues if the nonmember joins and pays dues for the current year at the meeting.